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Semiconductor ETFs

Funds holding chip designers, makers and equipment companies. The group is concentrated in a few very large holdings, so the funds move closely together. 9 funds in this group, ordered by trading volume (lowest expense ratio among those that report one: SOXQ at 0.19%). Data as of 22 Oct 2026. Educational, not advice.

Semiconductor ETFs: price, cost, yield and returns

#ETFCategoryPriceExpense ratioYield (12m)1Y return5Y a yearVolatility
1 SMH VanEck Semiconductor Semiconductors $523.35 0.35% 0.21% +55.0% +32.2% 40%
2 SOXX iShares Semiconductor Semiconductors $475.69 0.34% 0.26% +68.0% +26.3% 47%
3 PSI Invesco Dynamic Semiconductors Semiconductors $117.28 0.56% 0.02% +61.8% +22.2% 54%
4 SOXQ Invesco PHLX Semiconductor Semiconductors $84.43 0.19% 0.35% +61.2% +27.1% 45%
5 CHPY YieldMax Semiconductor Portfolio O... Covered call / option income $57.36 1.03% 48.21% +54.9% – 41%
6 EUV Corgi Lithography & Semiconductor... Semiconductors $20.08 – – – – –
7 FBCG Fidelity Blue Chip Growth Semiconductors $59.74 0.57% 0.03% +12.9% +11.9% 21%
8 XSD SPDR S&P Semiconductor Semiconductors $452.12 0.35% 0.18% +36.6% +17.2% 47%
9 FTXL First Trust Nasdaq Semiconductor Semiconductors $213.13 0.60% 0.08% +81.8% +26.2% 48%

Membership is assigned by StocksXray rules from the fund name, so a fund can appear in several groups and a fund with an unusual name can be missing. Yield is distributions paid in the last 12 months over the latest price; returns are total returns including distributions. Click a column title to sort.

Other ETF groups

Educational information, not financial advice. Funds can lose value, and past performance does not guarantee future results. Lists describe funds; they are not rankings of quality and not recommendations.